We protect process innovations across deposition, lithography, etch, and CMP. Practical patent strategies aligned with manufacturing goals.
We prosecute patents across deposition, lithography, etch, cleaning, and CMP, with claims crafted to maximize defensibility and business value. We tie process steps to measurable outcomes—uniformity, selectivity, defectivity, throughput—so claims reflect real manufacturing constraints.
We advise on licensing, international filings, and trade secret programs for sensitive manufacturing know‑how. Our approach spans tool controls, chemistries, film properties, and inline metrology, pairing patents with defensive publications where they best influence competitive behavior.
We coordinate with integration and equipment teams to ensure disclosures are technically complete without exposing confidential foundry data or PDK specifics.
Typical engagements include innovations in deposition and etch chemistry, photoresist processes, chamber design, and CMP slurries and pads. We connect process intent to manufacturing outcomes—uniformity, selectivity, defectivity, and throughput—so claims reflect real constraints and advantages.
We establish invention programs tuned for fab cadence: lightweight disclosure prompts, periodic cross‑functional reviews, and guidelines that distinguish patents from trade secrets while preserving ramp velocity.